Semiconductor wafer processing system and method

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United States of America Patent

PATENT NO 11901207
APP PUB NO 20220406639A1
SERIAL NO

17463846

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Abstract

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A semiconductor wafer processing system includes a stocker having an interior surface, a wafer carrier disposed within the stocker, a wafer shelf disposed within the wafer carrier for storing a semiconductor wafer, and a discharge circuit including a first conductor electrically coupled to the wafer shelf and a first current controller electrically coupled to the first conductor and to the interior surface of the stocker.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDNO 8 LI-HSIN 6 ROAD HSINCHU SCIENCE PARK HSINCHU ROC 30077

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiang, Wen-Chih Hsinchu, TW 49 57
Hsiao, Kai-Hung Kaohsiung, TW 6 0
Jen, Chi-Chung Kaohsiung, TW 46 36
Jian, Jhang-Jie Tainan, TW 2 0
Shen, Yu-Chun Tainan, TW 10 2

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