Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes

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United States of America Patent

PATENT NO 11901161
APP PUB NO 20220293396A1
SERIAL NO

17824977

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Abstract

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Methods and apparatus for reducing particle generation in a remote plasma source (RPS) include an RPS having a first plasma source with a first electrode and a second electrode, wherein the first electrode and the second electrode are symmetrical with hollow cavities configured to induce a hollow cathode effect within the hollow cavities, and wherein the RPS provides radicals or ions into the processing volume, and a radio frequency (RF) power source configured to provide a symmetrical driving waveform on the first electrode and the second electrode to produce an anodic cycle and a cathodic cycle of the RPS, wherein the anodic cycle and the cathodic cycle operate in a hollow cathode effect mode.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Tae Seung San Jose, US 21 1170
Lubomirsky, Dmitry Cupertino, US 306 29707
Natarajan, Saravana Kumar Tamil Nadu, IN 2 4
Schatz, Kenneth D Los Altos, US 30 1026
Subramanya, Samartha Bangalore, IN 3 4

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