Micro-opto-mechanical system sensor, arrangement and manufacturing method

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United States of America Patent

PATENT NO 11898899
APP PUB NO 20210255031A1
SERIAL NO

17175403

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Abstract

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There is provided a MOMS sensor comprising a fiber interface comprising a fiber passthrough for one or more optical fibers, a cavity comprising an element hermetically encapsulated within the cavity, wherein the element is movably anchored by SiN arms, which are movable with respect to walls of the cavity, wherein the SiN arms comprise anchor portions at first ends of the SiN arms, which are connected to the element, and at second ends of the SiN arms, which are connected to the walls of the cavity, and the fiber interface is configured to receive the fibers through the fiber passthrough into positions for communications of light between the element and the fibers. In this way a robust structure that supports sensitivity of the sensor is provided.

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Patent Owner(s)

Patent OwnerAddress
MIRAEX SA1024 ECUBLENS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abelé, Nicolas Lausanne, CH 7 29
Anderson, Mitchell Pully, CH 6 2
Feofanov, Olexiy Epalinges, CH 4 3
Javerzac-Galy, Clément Lausanne, CH 4 3

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