Method of preparing and analyzing thin films
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United States of America Patent
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Feb 6, 2024
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N/A
app pub date -
Dec 9, 2020
filing date -
Jul 24, 2020
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Abstract
Aspects of the disclosure provide a method of preparing a focused ion beam (FIB) sample and analyzing the sample in an electron microscope system. The method can include forming, over a substrate, a target film having a thickness of less than a threshold corresponding to a limit for FIB requirements, and forming a supporting film over the target film. The method can also include obtaining a FIB sample that includes a portion of the target film and a portion of the supporting film and. The method can further include analyzing the obtained portion of the target film in an electron microscope system.
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