Semiconductor device with low-k spacer
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United States of America Patent
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Jan 16, 2024
Grant Date -
N/A
app pub date -
Jul 13, 2021
filing date -
Aug 21, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
A semiconductor device includes: a semiconductor device, comprising: a bit line structure including a bit line contact plug, a bit line, and a bit line hard mask that are sequentially stacked over a substrate; a storage node contact plug that is spaced apart from the bit line structure; a conformal spacer that is positioned between the bit line and the storage node contact plug and includes a low-k material; and a seed liner that is positioned between the conformal spacer and the bit line and thinner than the conformal spacer.
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