Acoustic wave device with multi-layer substrate including ceramic

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United States of America Patent

PATENT NO 11876501
APP PUB NO 20200274517A1
SERIAL NO

16800248

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Abstract

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An acoustic wave device is disclosed. The acoustic wave device includes a support layer, a ceramic layer positioned over the support layer, a piezoelectric layer positioned over the ceramic layer, and an interdigital transducer electrode positioned over the piezoelectric layer. The support layer has a higher thermal conductivity than the ceramic layer. The ceramic layer can be a polycrystalline spinel layer. The acoustic wave device can be a surface acoustic wave device configured to generate a surface acoustic wave.

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Patent Owner(s)

Patent OwnerAddress
SKYWORKS SOLUTIONS INC5260 CALIFORNIA AVENUE IRVINE CA 92617

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukuhara, Hironori Ibaraki, JP 91 64
Goto, Rei Osaka, JP 213 810
Maki, Keiichi Suita, JP 85 281

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