Voltage waveform generator for plasma processing apparatuses

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United States of America Patent

PATENT NO 11875972
APP PUB NO 20220223377A1
SERIAL NO

17604897

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Abstract

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Methods and devices for generating a voltage waveform at an output may include providing four DC voltages of different magnitudes. The first (V1) magnitude is higher than the third (V3) and fourth (V4) magnitude. The fourth DC voltage is coupled to the output followed by coupling the first DC voltage to the output, to bring an output voltage (VP) at the output to a high level. The first DC voltage is decoupled from the output, followed by coupling the third DC voltage to the output, to obtain a drop of the output voltage (VP). A ground potential (V0) is coupled to the output following coupling the third DC voltage and the second DC current (I2) is coupled to the output following coupling the ground potential, wherein the second DC current ramps down the output voltage (VP).

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Patent Owner(s)

Patent OwnerAddress
PRODRIVE TECHNOLOGIES INNOVATION SERVICES B V5692 EM SON EN BREUGEL

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Driessen, Antonius Wilhelmus Hendricus Johannes Groningen, NL 4 3

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