Component and apparatus of manufacturing semiconductor
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United States of America Patent
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Jan 16, 2024
Grant Date -
Jul 2, 2020
app pub date -
Feb 28, 2020
filing date -
Sep 1, 2017
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Abstract
A component comprises a film containing yttrium oxide. A cross section of the film has a first portion, a second portion, and a third portion, and the first to third portions are separated from each other by 0.5 mm or more. A Vickers hardness B1 measured in the first portion, a Vickers hardness B2 measured in the second portion, a Vickers hardness B3 measured in the third portion, and an average value A of the Vickers hardnesses B1 to B3 are numbers satisfying 0.8A≤B1≤1.2A, 0.8A≤B2≤1.2A, and 0.8A≤B3≤1.2A.
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