System for predicting properties of structures, imager system, and related methods

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United States of America Patent

PATENT NO 11869178
APP PUB NO 20210090246A1
SERIAL NO

17117222

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Abstract

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A method of predicting virtual metrology data for a wafer lot that includes receiving first image data from an imager system, the first image data relating to at least one first wafer lot, receiving measured metrology data from metrology equipment relating to the at least one first wafer lot, applying one or more machine learning techniques to the first image data and the measured metrology data to generate at least one predictive model for predicting at least one of virtual metrology data or virtual cell metrics data of wafer lots, and utilizing the at least one generated predictive model to generate at least one of first virtual metrology data or first virtual cell metrics data for the first wafer lot.

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Patent Owner(s)

Patent OwnerAddress
MICRON TECHNOLOGY INCIDAHO IDAHO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haller, Gordon A Boise, US 84 1995
Liu, Qianlan Boise, US 4 5
Lyonsmith, Shawn D Boise, US 18 71
Majumdar, Amitava Boise, US 73 253
McCandless, Steve K Nampa, US 3 5
Noemaun, Ahmed N Boise, US 7 23
Ramachandran, Pradeep Lehi, US 5 10
Taylor, Ted L Boise, US 5 18

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