Complex spatially-resolved reflectometry/refractometry

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United States of America Patent

PATENT NO 11867626
APP PUB NO 20210325301A1
SERIAL NO

17228178

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Abstract

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Apparatus and methods for complex imaging reflectometry and refractometry using at least partially coherent light. Quantitative images yield spatially-dependent, local material information about a sample of interest. These images may provide material properties such as chemical composition, the thickness of chemical layers, dopant concentrations, mixing between layers of a sample, reactions at interfaces, etc. An incident beam of VUV wavelength or shorter is scattered off of a sample and imaged at various angles, wavelengths, and/or polarizations. The power of beam is also measured. This data is used to obtain images of a sample's absolute, spatially varying, complex reflectance or transmittance, which is then used to determine spatially-resolved, depth-dependent sample material properties.

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THE REGENTS OF THE UNIVERSITY OF COLORADO A BODY CORPORATE1800 GRANT STREET 8TH FLOOR DENVER CO 80203

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adams, Daniel E Thornton, US 7 109
Kapteyn, Henry C Boulder, US 25 224
Murnane, Margaret M Boulder, US 13 99
Porter, Christina Superior, US 2 6
Shanblatt, Elisabeth Boulder, US 1 0
Tanksalvala, Michael Longmont, US 4 7

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