Piezoelectric actuator and fluid control valve

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United States of America Patent

PATENT NO 11867308
APP PUB NO 20200185588A1
SERIAL NO

16689878

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Abstract

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In order to provide a piezoelectric actuator and a fluid control valve that can vaporize a liquid material more effectively than a conventional arrangement, the piezoelectric actuator comprises a piezoelectric stack wherein a piezoelectric ceramic layer and an electrode layer are alternately laminated, a DC voltage application circuit that displaces the piezoelectric stack by applying a DC voltage to at least a part or whole of the piezoelectric stack, and a vibration voltage application circuit that vibrates the piezoelectric stack by applying a voltage having a predetermined frequency or above to at least a part or whole of the piezoelectric stack.

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Patent Owner(s)

Patent OwnerAddress
HORIBA STEC CO LTDKYOTO 601-8116

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayashi, Shigeyuki Kyoto, JP 68 711
Yasuda, Tadahiro Kyoto, JP 46 583

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