X-ray source with liquid cooled source coils

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United States of America Patent

PATENT NO 11864300
APP PUB NO 20220346211A1
SERIAL NO

17238785

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Abstract

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The electron beam is typically dynamically steered after its generation on the path to the target. The steering is performed by one or more source coils. These coils produce the magnetic field outside the vacuum vessel allowing air/water/oil cooling to remove undesired heat. The magnetic field is then picked up inside the vacuum vessel with pole pieces and guided towards the region where the magnetic field is needed to steer the electron beam.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS X-RAY MICROSCOPY INC5300 CENTRAL PARKWAY DUBLIN CA 94568

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Case, Thomas A Walnut Creek, US 13 160
Flachenecker, Claus Hayward, US 12 627

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