Acoustic wave device including multi-layer interdigital transducer electrodes
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United States of America Patent
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Jan 2, 2024
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N/A
app pub date -
Aug 20, 2019
filing date -
Feb 15, 2013
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Abstract
A surface acoustic wave device comprises a substrate and an interdigital transducer (IDT) electrode disposed on the substrate. The IDT electrode includes a lower electrode layer having a lower surface in contact with an upper surface of the substrate and an upper electrode layer having a lower surface defining a base in contact with an upper surface of the lower electrode layer. Side surfaces of the lower electrode layer are substantially perpendicular to the upper surface of the substrate. Side surfaces of the upper electrode layer are disposed at an acute angle relative to the upper surface of the substrate.
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