Overlay mark design for electron beam overlay

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11862524
APP PUB NO 20220415725A1
SERIAL NO

17487842

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Abstract

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The present disclosure provides a target and a method of performing overlay measurements on a target. The target includes an array of cells comprising a first cell, a second cell, a third cell, and a fourth cell. Each cell includes a periodic structure with a pitch. The periodic structure includes a first section and a second section, separated by a first gap. The target further includes an electron beam overlay target, such that electron beam overlay measurements, advanced imaging metrology, and/or scatterometry measurements can be performed on the target.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eyring, Stefan Weilburg, DE 17 65
Feler, Yoel Haifa, IL 43 460
Ghinovker, Mark Yoqneam Ilit, IL 86 1926
Gutman, Nadav Zichron Ya'aqov, IL 31 108
Hajaj, Eitan Ashqelon, IL 12 11
Naot, Ira Milpitas, US 19 170
Pohlmann, Ulrich Jena, DE 11 63
Steely, Chris Yokneam Ilit, IL 6 5
Steely-Tarshish, Inna Yokneam Ilit, IL 6 3
Yohanan, Raviv Qiryat Motzkin, IL 14 74

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