Correcting component failures in ion implant semiconductor manufacturing tool
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United States of America Patent
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Jan 2, 2024
Grant Date -
Sep 22, 2022
app pub date -
May 27, 2022
filing date -
Jan 31, 2019
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Abstract
A method includes determining, based on sensor data, that one or more components of substrate processing equipment are within a pre-failure window that is after a normal operation window. Corresponding data points in the normal operation window are substantially stable along a first health index value. The corresponding data points in the pre-failure window increase from the first health index value to a peak at a second health index value. Responsive to the determining that the one or more components are within the pre-failure window, the method further includes causing performance of a corrective action associated with the one or more components of the substrate processing equipment.
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