Semiconductor manufacturing system, behavior recognition device and semiconductor manufacturing method

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United States of America Patent

PATENT NO 11860607
SERIAL NO

16996832

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Abstract

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A behavior recognition device for recognizing behaviors of a semiconductor manufacturing apparatus includes a storage device and a control unit. The storage device is configured to store log data of the semiconductor manufacturing apparatus. The control unit is cooperatively connected to the storage device, and configured to build a transition state model based on the log data to analyze behaviors related to wafer transfer sequences and manufacturing operations of the semiconductor manufacturing apparatus.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN ROAD 6 HSINCHU SCIENCE PARK HSINCHU 300

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ko, Li-Jen Hsinchu County, TW 8 35
Shen, Hsiang Yin Hsinchu, TW 39 32
Yang, Kai-Ting Taichung, TW 2 3

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