Ultrasonic device and ultrasonic sensor
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United States of America Patent
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Jan 2, 2024
Grant Date -
Jul 22, 2021
app pub date -
Jan 19, 2021
filing date -
Jan 21, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is an ultrasonic device including a substrate and a vibration plate provided on the substrate and having one or more vibrators configured to generate an ultrasonic wave by vibration. The vibration plate has a movable portion provided with the vibrator and configured to vibrate accompanying with the vibration of the vibrator, and a fixed portion fixed to the substrate. A vibration frequency of a reflected wave based on a wave transmitted from the movable portion and received by the movable portion is outside a vibration frequency band region of the vibrator.
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