Substrate processing system and substrate processing method
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United States of America Patent
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Dec 26, 2023
Grant Date -
Jan 14, 2021
app pub date -
Jul 2, 2020
filing date -
Jul 8, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate processing system includes: a substrate transfer device; processing units each having a substrate holding mechanism for rotatably holding a substrate received from the substrate transfer device and a processing fluid supply part for supplying a processing fluid to the substrate; and a controller for controlling the substrate transfer device and the processing units according to processing recipe information so as to execute the substrate processing process. When an abnormality in a certain unit of the processing units occurs in the substrate processing process for the substrate to be processed, the controller controls the substrate transfer device and a relief processing unit according to complementary recipe information so that the complementary processing process for a relief substrate is executed in the relief processing unit by transferring the relief substrate to the relief processing unit different from the certain processing unit.
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