Cantilever with a collocated piezoelectric actuator-sensor pair

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United States of America Patent

PATENT NO 11852654
APP PUB NO 20210020825A1
SERIAL NO

16932161

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Abstract

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Illustrative embodiments provide an apparatus comprising a substrate comprising a cantilever, a bottom electrode on the substrate, a bottom piezoelectric transducer on the bottom electrode such that the bottom electrode is between the substrate and the bottom piezoelectric transducer, a middle electrode on the bottom piezoelectric transducer such that the bottom piezoelectric transducer is between the bottom electrode and the middle electrode, a top piezoelectric transducer on the middle electrode such that the middle electrode is between the bottom piezoelectric transducer and the top piezoelectric transducer, and a top electrode on the top piezoelectric transducer, such that the top piezoelectric transducer is between the middle electrode and the top electrode. Illustrative embodiments also provide a method of making the apparatus and a method of using the apparatus for atomic force microscopy.

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Patent Owner(s)

Patent OwnerAddress
BOARD OF REGENTS THE UNIVERSITY OF TEXAS SYSTEM210 WEST 7TH STREET AUSTIN TX 78701

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mahdavi, Mohammad Dallas, US 2 6
Moheimani, Seyed Omid Reza Allen, US 6 5

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