Method for calibrating nano measurement scale and standard material used therein
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United States of America Patent
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Dec 26, 2023
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N/A
app pub date -
Jun 3, 2021
filing date -
Dec 15, 2020
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Abstract
Provided is a method of calibrating a nano measurement scale using a standard material including: measuring widths of a plurality of nanostructures included in the standard material and having pre-designated certified values of different sizes by a microscope; determining measured values for the widths of each of the plurality of nanostructures measured by the microscope based on a predetermined criterion; and calibrating a measurement scale of the microscope based on the certified values and the measured values.
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