Method of unloading an object from a support table

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United States of America Patent

PATENT NO 11846879
APP PUB NO 20230054421A1
SERIAL NO

17982226

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Abstract

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A method of unloading an object from a support table, the object clamped to the support table during an exposure process by: applying a first pressure to a central region of the support table under a central portion of the object; and applying a second pressure to a peripheral region of the support table under a peripheral portion of the object, wherein during clamping the first pressure and the second pressure are controlled such that liquid is retained between the object and a seal member that is positioned radially between the central region and the peripheral region at an upper surface of the support table and protrudes towards the object, the method including: increasing the first pressure towards ambient pressure; removing at least some of the liquid retained between the object and the seal member by decreasing the second pressure; and increasing the second pressure towards the ambient pressure.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VPO BOX 324 VELDHOVEN 5500 AH

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bloks, Ruud Hendrikus Martinus Johannes Helmond, NL 28 90
De, Simone Giovanna Eindhoven, NL 3 0
Gerritzen, Justin Johannes Hermanus Veldhoven, NL 9 14
Laurent, Thibault Simon Mathieu Eindhoven, NL 43 333
Roset, Niek Jacobus Johannes Eindhoven, NL 31 219
Van, Den Heuvel Marco Adrianus Peter Waalre, NL 8 30

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