Method of assembling a facet mirror of an optical system

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United States of America Patent

PATENT NO 11841620
APP PUB NO 20230161266A1
SERIAL NO

17989477

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Abstract

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A method of assembling a facet mirror of an optical system, in which facets of the facet mirror are imaged onto a field plane of the optical system, includes: a) determining positions of the facets of the facet mirror relative to interfaces of the facet mirror, with the aid of which the facet mirror is able to be connected to a support structure; b) calculating an actual position of an object field of the optical system arising for the facet mirror in the field plane; and c) arranging spacers between the interfaces and the support structure so that the object field in the field plane is brought from the calculated actual position to a target position.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHGERMANY COHEN OBERKOCHEN BADEN-WURTTEMBERG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guhr, Daniel Steinheim am Albuch, DE 2 1
Königer, Andreas Aalen, DE 1 0
Müller, Ulrich Aalen, DE 140 962

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