Mask and method for manufacturing the same, exposure system, method for manufacturing a display substrate, and display device

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United States of America Patent

PATENT NO 11841615
APP PUB NO 20210033961A1
SERIAL NO

16883428

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Abstract

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A mask includes a first light-transmitting portion. The first light-transmitting portion includes a target region and at least one compensation region connected to the target region. A planar pattern of the target region includes a plurality of corners, and a planar pattern of each compensation region extends from one of the plurality of corners. An area of the planar pattern of each compensation region is less than an area of the planar pattern of the target region.

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Patent Owner(s)

  • CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO.,LTD.; BOE TECHNOLOGY GROUP CO. LTD.

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dong, Zhifu Beijing, CN 32 114
Fu, Pengcheng Beijing, CN 10 158
Mei, Wenlin Beijing, CN 7 13
Xu, Zhuo Beijing, CN 44 83
Zhang, Shouqiang Beijing, CN 7 5

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