Imprint apparatus, imprint method, and method of manufacturing article
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United States of America Patent
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Dec 12, 2023
Grant Date -
Oct 20, 2022
app pub date -
Apr 12, 2022
filing date -
Apr 20, 2021
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Abstract
An imprint apparatus executes an imprint process for shaping an imprint material by using a mold. The apparatus includes a controller which obtains first height distribution information indicating a height distribution of a surface of a first substrate, and a measuring device which obtains second height distribution information indicating a height distribution of a surface of a second substrate. The controller controls the imprint process based on corrected height distribution information which is obtained by removing a first component that is an approximation function, of an order not more than a first predetermined order, for approximating the first height distribution information, from the first height distribution information, and a second component which is an approximation function, of an order not more than a second predetermined order, for approximating the second height distribution information.
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