Vibration component measurement device, Kelvin probe force microscope, and vibration component measurement method
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United States of America Patent
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Dec 5, 2023
Grant Date -
Apr 13, 2023
app pub date -
Mar 25, 2021
filing date -
Mar 26, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
In order to increase the order of a frequency of an AC signal to be applied between a vibration section and a sample to an order at substantially the same level as the order of a vibration frequency of the vibration section in measuring a vibration component of the vibration control section, a vibration component measuring device (2) includes: a vibration section (4); a first AC signal generator (20) configured to generate a first AC signal; a second AC signal generator (44) configured to generate a second AC signal having a frequency which is (a) more than one time and less than two times or (b) more than two times and less than three times as high as a frequency of the first AC signal; a signal applying section (14, 56) configured to apply the second AC signal between the vibration section and a sample (X); a vibration control section (10) configured to cause the vibration section to vibrate; and a measuring section (16, 18, 20, 22, 42, 44, 50) configured to measure a varying component of vibration of the vibration section, the varying component being varied by an interaction between the vibration section and the sample.
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