Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask

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United States of America Patent

PATENT NO 11829065
APP PUB NO 20230251564A1
SERIAL NO

18193674

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Abstract

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A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; and a phase shift film that shifts a phase of the EUV light, in this order. The phase shift film contains a compound containing ruthenium (Ru) and an element X2 different from Ru. A melting point MP1 of an oxide of the compound and a melting point MP2 of a fluoride or an oxyfluoride of the compound satisfy a relation of

description='In-line Formulae' end='lead'0.625MP1+MP2≤1000.description='In-line Formulae' end='tail'

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Patent Owner(s)

Patent OwnerAddress
AGC INC5-1 MARUNOUCHI 1-CHOME CHIYODA-KU TOKYO 100-8405

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akagi, Daijiro Tokyo, JP 24 20
Ishikawa, Ichiro Tokyo, JP 15 38
Iwaoka, Hiroaki Tokyo, JP 14 15
Taki, Shunya Tokyo, JP 8 4

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