Method for sensing abnormality of piezoelectric drive device, piezoelectric drive device, and robot

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United States of America Patent

PATENT NO 11824469
SERIAL NO

17534472

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Abstract

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A method for sensing an abnormality of a piezoelectric drive device is a method for sensing a vibration abnormality of the piezoelectric drive device having a substrate and thin-film piezoelectric elements placed on the substrate and controlling amplitude of the piezoelectric elements using a drive control signal, and the method includes sensing the vibration abnormality by a drive voltage corresponding to the drive control signal.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATION1-6 SHINJUKU 4-CHOME SHINJUKU-KU TOKYO 160-8801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kajino, Kiichi Matsumoto, JP 29 85

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