Multi-shield plate and control system

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United States of America Patent

PATENT NO 11823919
APP PUB NO 20220351990A1
SERIAL NO

17863960

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Abstract

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A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further includes a plurality of apertures in the plate, wherein each of the plurality of apertures extends through the entirety of the plate in the thickness direction and, an aperture of the plurality of apertures is aligned with a corresponding window of the plurality of windows along radius of the multi-shield plate.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ho, Monica Hsinchu, TW 4 18
Lien, Wen-Cheng Hsinchu, TW 10 26
Lin, Chun-Chih Hsinchu, TW 55 80
Lin, Ping-Tse Hsinchu, TW 5 1

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