Image pickup apparatus and focus adjustment method using bending correction to adjust focusing
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United States of America Patent
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Nov 21, 2023
Grant Date -
Jan 21, 2021
app pub date -
Jul 16, 2020
filing date -
Jul 19, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
An image pickup apparatus includes a stage configured to support a sample at a plurality of support points, a bending data acquisition unit configured to acquire bending data corresponding to a bending of the sample supported on the stage, a height information detection unit configured to detect a height of the sample supported on the stage, a difference value calculation unit configured to calculate a difference value between a height indicated by height information and a height indicated by the bending data at each of a plurality of points on the sample, a correction data calculation unit configured to calculate correction data based on the difference value, and an estimation unit configured to calculate estimation data for estimating the height of the sample by correcting the bending data using the correction data.
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