Thin free-standing oxide membranes

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United States of America Patent

PATENT NO 11821081
SERIAL NO

17449900

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Abstract

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This disclosure provides systems, methods, and apparatus related to thin free-standing oxide membranes. In one aspect, a method includes providing a substrate. The substrate defines a hole having a diameter of about 500 nanometers to 5000 nanometers. A layer of metal is deposited on the substrate. A supporting layer is deposited on the layer of metal. A first side of the supporting layer is the side that is disposed on the layer of metal. A metal oxide layer is deposited on the first side of the supporting layer and on the substrate. In some implementations, the method further includes removing the supporting layer.

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Patent OwnerAddress
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA1111 FRANKLIN STREET TWELFTH FLOOR OAKLAND CA 94607-5200

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lu, Yi-Hsien El Cerrito, US 2 2
Salmeron, Miquel Kensington, US 4 7
Sanchez, Carlos Morales Cottbus, DE 1 0
Schwartzberg, Adam Richmond, US 10 77
van, Spronsen Matthijs Berkeley, US 1 0
Zhao, Xiao El Cerrito, US 10 182

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