Precursor supply system and precursors supply method

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United States of America Patent

PATENT NO 11819838
APP PUB NO 20190134586A1
SERIAL NO

16096085

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Abstract

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The present invention provides a supply system enabling a precursor of a solid material or a precursor of a liquid material to be supplied to a latter process at no higher concentration than required and also at or above a predetermined concentration.

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Patent Owner(s)

Patent OwnerAddress
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE75 QUAI D'ORSAY PARIS 75007 75007

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goto, Mikio Tokyo, JP 11 68
Kameoka, Takashi Tsukuba, JP 13 192
Kumamoto, Yuki Tsukuba, JP 1 2
Morimoto, Kouki Tokyo, JP 14 75
Nakagawa, Toshiyuki Hyogo, JP 181 1850
Suzuki, Kazuma Tsukuba, JP 20 78
Yanagita, Kazutaka Tsukuba, JP 89 2867

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