Gold sputtering target
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United States of America Patent
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-
Nov 14, 2023
Grant Date -
Apr 27, 2023
app pub date -
Dec 23, 2022
filing date -
Jun 2, 2016
priority date (Note) -
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Abstract
A gold sputtering target is made of gold and inevitable impurities, and has a surface to be sputtered. In the gold sputtering target, an average value of Vickers hardness is 40 or more and 60 or less, and an average crystal grain size is 15 μm or more and 200 μm or less. A {110} plane of gold is preferentially oriented at the surface to be sputtered.
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