Detection system for X-ray inspection of an object

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United States of America Patent

PATENT NO 11817231
APP PUB NO 20230046280A1
SERIAL NO

17402822

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane. A control device has a drive control unit, which is in signal connection with the shield stop displacement drive and with the object displacement drive for synchronizing a movement of the shield stop displacement drive and the object displacement drive. The result is an optimization of an X-ray illumination of the object to achieve a high-resolution object imaging.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT INC75 SYLVAN ST SUITE 101 DANVERS MA 01923

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Atkinson, Mora Juan Hillsboro, US 1 1
Case, Thomas Anthony Walnut Creek, US 8 151
Feldmann, Heiko Aalen, DE 77 442
Graf, Vom Hagen Christoph Hilmar Oakland, US 6 1
Gregorich, Thomas Matthew Milpitas, US 19 137
Krampert, Gerhard Pleasanton, US 24 243
Ruoff, Johannes Aalen, DE 43 353

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