Flow control system, method, and apparatus

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United States of America Patent

PATENT NO 11815920
SERIAL NO

17468042

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Abstract

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A gas flow control system for delivering a plurality of gas flows. The gas flow control system has a gas flow path extending from a gas inlet to first and second gas outlets. First and second flow restrictors are operably coupled to the gas flow path. First and second valves are operably coupled to the gas flow path such that when both first and second valves are in a fully open state, flows of gas from the first and second gas outlets are split according to the impedances of the first and second flow restrictors.

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Patent Owner(s)

Patent OwnerAddress
ICHOR SYSTEMS INC3185 LAURELVIEW CT FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Maeder, Michael Reno, US 8 33
Mudd, Daniel T Reno, US 36 848
Mudd, Patti J Reno, US 17 184
Penley, Sean Joseph Sparks, US 8 4

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