Hybrid structure for a surface acoustic wave device

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United States of America Patent

PATENT NO 11800803
APP PUB NO 20190165252A1
SERIAL NO

16306822

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Abstract

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A hybrid structure for a surface acoustic wave device comprises a useful layer of piezoelectric material having a first free surface and a second surface disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer, wherein the useful layer comprises an area of nanocavities.

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Patent Owner(s)

Patent OwnerAddress
SOITECPARC TECHNOLOGIQUE DES FONTAINES CHEMIN DES FRANQUES BERNIN 38190

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Broekaart, Marcel Theys, FR 47 259

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