Nanometric electromechanical actuator and method of manufacturing the same

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United States of America Patent

PATENT NO 11799396
SERIAL NO

17305727

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Abstract

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A method for manufacturing an electromechanical actuator includes providing a primary stack of layers comprising a monocrystalline layer, providing a secondary stack of layers, and forming, in the etching layer, at least three pads. The method further includes encapsulating the three pads by a first encapsulation layer, assembling the primary stack of layers with the secondary stack of layers, removing the first substrate, and forming a movable electrode in the monocrystalline layer.

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Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESFRANCE PARIS PARIS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hutin, Louis Grenoble, FR 21 46
Usai, Giulia Grenoble, FR 1 0

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