Open-ended type substrate receiving cassette and system thereof

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United States of America Patent

PATENT NO 11798829
SERIAL NO

17207182

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A cassette which receives a substrate, and a substrate receiving system including a chamber which receives a cassette in which a substrate is loaded are provided. The cassette which receives a substrate includes: a plurality of slot supports stacked in a first direction; and a frame connected to the plurality of slot supports and extending in the first direction, wherein the plurality of slot supports and the frame are opened in an outward direction to receive the substrate, and are closed in an inward direction after the substrate is received.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Yoon Su Pyeongtaek-si, KR 21 79

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