Hollow cathode, an apparatus including a hollow cathode for manufacturing a semiconductor device, and a method of manufacturing a semiconductor device using a hollow cathode
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United States of America Patent
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Oct 24, 2023
Grant Date -
Feb 25, 2021
app pub date -
Nov 6, 2020
filing date -
Oct 23, 2017
priority date (Note) -
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Abstract
A hollow cathode includes an insulation plate having cathode holes. Bottom electrodes are below the insulation plate. The bottom electrodes define first holes having a width greater than a width of the cathode holes. Top electrodes are at an opposite side of the insulation plate from the bottom electrodes. The top electrodes define second holes aligned with the first holes along a direction orthogonal to the upper surface of the insulation plate.
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