Method for determining root causes of events of a semiconductor manufacturing process and for monitoring a semiconductor manufacturing process
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United States of America Patent
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Oct 24, 2023
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N/A
app pub date -
Oct 21, 2019
filing date -
Nov 26, 2018
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Abstract
A user interface for designing, configuring and/or editing a control flow representing a control strategy associated with a semiconductor manufacturing process, the user interface including: a library of control elements having at least a control element representing a task of simulation and each control element being selectable by a user; a control flow editor configured to organize the control elements into a control flow representing the control strategy; and a communication interface for communicating the control flow to a calculation engine configured to evaluate the control flow.
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