Apparatus and method for a scanning probe microscope
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 24, 2023
Grant Date -
May 12, 2022
app pub date -
Jan 25, 2022
filing date -
Mar 31, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully