Absorbance analysis apparatus for DCR gas, absorbance analysis method for DCR gas, and absorbance analysis program recording medium on which program for DCR gas is recorded

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United States of America Patent

PATENT NO 11796460
APP PUB NO 20220307977A1
SERIAL NO

17695167

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Abstract

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In order to provide an absorbance analysis apparatus for DCR gas that can measure a concentration of a DCR gas by separating absorbance of the DCR gas alone even in a mixed gas consisting of the DCR gas and CO gas whose absorption spectrum overlaps each other, the absorbance analysis apparatus for DCR gas comprises a DCR filter 31 that is configured to transmit a light in a first wavenumber domain including an absorbance peak of the DCR gas, a CO filter 32 that is configured to transmit a light in a second wavenumber domain that is different from the first wavenumber domain, and a DCR gas volume calculator 4 that is configured to calculate volume of the DCR gas based on a first absorbance measured by the light transmitted through the DCR filter 31 and a second absorbance measured by the light transmitted through the CO filter 32.

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Patent Owner(s)

Patent OwnerAddress
HORIBA STEC CO LTD11-5 HOKODATE-CHO KAMITOBA MINAMI-KU KYOTO-SHI KYOTO 601-8116

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuya, Yuichi Yamanashi, JP 17 497
Minami, Masakazu Kyoto, JP 24 415
Sakaguchi, Yuhei Kyoto, JP 13 43
Shimizu, Toru Kyoto, JP 120 2142
Tanaka, Masayuki Yamanashi, JP 361 4182

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