Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11789371
APP PUB NO 20220373892A1
SERIAL NO

17882389

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method including: obtaining a thin-mask transmission function of a patterning device and a M3D model for a lithographic process, wherein the thin-mask transmission function is a continuous transmission mask (CTM) and the M3D model at least represents a portion of M3D attributable to multiple edges of structures on the patterning device; determining a M3D mask transmission function of the patterning device by using the thin-mask transmission function and the M3D model; and determining an aerial image produced by the patterning device and the lithographic process, by using the M3D mask transmission function.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VHOLLAND WEIDE EINDHOVEN

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Biswas, Roshni San Jose, US 5 4
Cao, Yu Saratoga, US 407 9726
Howell, Rafael C Santa Clara, US 27 184
Liu, Peng Cupertino, US 833 6111
Lu, Yen-Wen Saratoga, US 74 995

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Apr 17, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 17, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 17, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00