Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope

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United States of America Patent

PATENT NO 11789037
APP PUB NO 20230019239A1
SERIAL NO

17757343

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Abstract

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An atomic force microscope has dual probes composed of a hinge structure, two cantilever beams and needle tips arranged on free ends of the cantilever beams. The hinge structure is a U-shaped body having two ends respectively extended with a first cantilever beam and a second cantilever beam. The free end of the first cantilever beam and the free end of the second cantilever beam are respectively provided with a first needle tip and a second needle tip. The integrated dual probes is operated by the driving function of the probe clamp. Therefore, only a set of motion control and measurement system of the atomic force microscope is required to realize the rapid in-situ switching function of the dual probes.

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Patent Owner(s)

Patent OwnerAddress
SHENYANG INSTITUTE OF AUTOMATION CHINESE ACADEMY OF SCIENCESNO 114 NANTA STREET SHENHE DISTRICT SHENYANG CITY LIAONING PROVINCE 110016 SHENYANG CITY LIAONING PROVINCE 110016

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Lianqing Liaoning, CN 4 1
Shi, Jialin Liaoning, CN 5 4
Yu, Peng Liaoning, CN 95 400

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