Piezoelectric film, method of manufacturing same, piezoelectric film laminated body, and method of manufacturing same

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United States of America Patent

PATENT NO 11785857
APP PUB NO 20200357976A1
SERIAL NO

16937966

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Abstract

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Provided is a piezoelectric film including an AlN crystal, and a first element and a second element doped to the AlN crystal. The first element is an element having an ionic radius larger than an ionic radius of Al. The second element is an element having an ionic radius smaller than the ionic radius of Al. Also provided are piezoelectric film laminated body including an underlayer and a piezoelectric film including ScAlN, and a method of manufacturing the same. The underlayer has a crystal lattice having six-fold symmetry or three-fold symmetry. Also provided are a piezoelectric film including ScAlN having a laminated structure of a hexagonal crystal and a cubic crystal, and a method of manufacturing the same. The cubic crystal is doped with an element other than trivalent element.

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Patent Owner(s)

Patent OwnerAddress
DENSO CORPORATIONKARIYA-CITY AICHI-PREF 448-8661

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kano, Kazuhiko Kariya, JP 53 774
Sakai, Kenichi Kariya, JP 59 475
Teshigahara, Akihiko Kariya, JP 23 309

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