High precision air bearing stage with capability of parasitic error compensation
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United States of America Patent
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Oct 10, 2023
Grant Date -
May 25, 2023
app pub date -
Feb 10, 2022
filing date -
Nov 19, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A high precision air bearing stage for wafer inspection and a method of runout errors detecting and compensating. The air bearing stage includes a base block, a crossbeam mounted on the base block, a sliding table configured to carry a compensation stage, a motor and a grating ruler used to drive the sliding table to move along the crossbeam, sensors used for monitoring the position of the sliding table in real time, air-bearing used for supporting the sliding table, and a compensation stage configured to compensate the runout errors of the air bearing stage based on the real-time detecting data from the sensors. The air-bearing includes a first air-bearing, a second air-bearing and a third air-bearing.
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