Capacitor and method for producing same
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United States of America Patent
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Oct 10, 2023
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N/A
app pub date -
Sep 10, 2021
filing date -
Mar 13, 2019
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Abstract
A capacitor includes a silicon substrate, a conductor layer, and a dielectric layer. The silicon substrate has a principal surface including a capacitance generation region and a non-capacitance generation region. The silicon substrate has a porous part provided in a thickness direction in the capacitance generation region. The conductor layer has a surface layer part at least covering part of a surface of the capacitance generation region and a filling part filled in at least part of fine pores of the porous part. The dielectric layer is provided between an inner surface of the fine pores and the filling part.
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