Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank

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United States of America Patent

PATENT NO 11781233
SERIAL NO

17530074

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Abstract

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The present invention relates to a copper oxide solid for use in plating of a substrate using an insoluble anode. Further the present invention relates to a method of producing the copper oxide solid. Further the present invention relates to an apparatus for supplying a plating solution in which the copper oxide solid is dissolved into a plating tank. A copper oxide solid (CS) to be supplied into a plating solution for plating a substrate (W) includes a copper oxide powder and a liquid as a binder to solidify the copper oxide powder.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 1448510 ?1448510

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dou, Chunhui Tokyo, JP 4 2
Kimura, Risa Tokyo, JP 9 2
Yamakawa, Junitsu Tokyo, JP 16 77
Yokoyama, Toshio Tokyo, JP 76 921

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