3D nanochannel interleaved devices
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United States of America Patent
Stats
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Oct 10, 2023
Grant Date -
Jun 10, 2021
app pub date -
Dec 5, 2019
filing date -
Dec 5, 2019
priority date (Note) -
In Force
status (Latency Note)
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Abstract
3D nanochannel interleaved devices for molecular manipulation are provided. In one aspect, a method of forming a device includes: forming a pattern on a substrate of alternating mandrels and spacers alongside the mandrels; selectively removing the mandrels from a front portion of the pattern forming gaps between the spacers; selectively removing the spacers from a back portion of the pattern forming gaps between the mandrels; filling i) the gaps between the spacers with a conductor to form first electrodes and ii) the gaps between the mandrels with the conductor to form second electrodes; and etching the mandrels and the spacers in a central portion of the pattern to form a channel (e.g., a nanochannel) between the first electrodes and the second electrodes, wherein the first electrodes and the second electrodes are offset from one another across the channel, i.e., interleaved. A device formed by the method is also provided.
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International Classification(s)
- 2019 Application Filing Year
- B01L Class
- 1838 Applications Filed
- 1060 Patents Issued To-Date
- 57.68 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B01L Class
- 0 % this patent is cited more than
- 2 Age
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