Method of and apparatus for extending electrode life in a laser chamber
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United States of America Patent
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Oct 3, 2023
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N/A
app pub date -
Oct 9, 2018
filing date -
Oct 24, 2017
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Abstract
Disclosed are methods of and apparatus for extending a useful lifetime of a laser discharge chamber in which a polarity of an electrode positioned at a fixed position within the chamber is caused to be positive with respect to the polarity of a second electrode defining a discharge gap with the first electrode and the first electrode is made of a material that forms an erosion resistant surface when the first electrode is used and an anode. Also disclosed is an arrangement in which a first electrode is positionable with respect a second electrode defining a discharge gap with the second electrode and the position of the first electrode controlled to maintain the width of the gap within a predetermined range.
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