Method and system for determining overlay

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United States of America Patent

PATENT NO 11774869
SERIAL NO

17599302

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Abstract

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A method of determining an overlay value of a substrate, the method including: obtaining temperature data that includes data on measured temperature at one or more positions on a substrate table after a substrate has been loaded onto the substrate table; and determining an overlay value of the substrate in dependence on the obtained temperature data. There is further disclosed a method of determining a performance of a clamping by a substrate table using a determined overlay value.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL-5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bloks, Ruud Hendrikus Martinus Johannes Helmond, NL 28 90
Borger, Hendrik Cornelis Anton Eindhoven, NL 3 6
De, Jong Frederik Eduard Veldhoven, NL 23 252
Kunnen, Johan Gertrudis Cornelis Weert, NL 35 290
Landheer, Siebe Eindhoven, NL 16 91
Li, Chung-Hsun Eindhoven, NL 11 26
Neefs, Patricius Jacobus Raamsdonksveer, NL 5 10
Tsirogiannis, Georgios Eindhoven, NL 9 42
Zeng, Si-Han Eindhoven, NL 5 33

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